Year
Month
(Peer-Reviewed) Microsphere femtosecond laser sub-50 nm structuring in far field via non-linear absorption
Zhenyuan Lin 林真源 ¹ ³, Kuan Liu 刘宽 ², Tun Cao 曹暾 ², Minghui Hong 洪明辉 ¹ ³
¹ Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University , Xiamen 361102, China
中国 厦门 厦门大学萨本栋微米纳米科学技术研究院
² School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China
中国 大连 大连理工大学光电工程与仪器科学学院
³ Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, 117576, Singapore
Opto-Electronic Advances, 2023-06-25
Abstract

Creation of arbitrary features with high resolution is critically important in the fabrication of nano-optoelectronic devices. Here, sub-50 nm surface structuring is achieved directly on Sb2S3 thin films via microsphere femtosecond laser irradiation in far field.

By varying laser fluence and scanning speed, nano-feature sizes can be flexibly tuned. Such small patterns are attributed to the co-effect of microsphere focusing, two-photons absorption, top threshold effect, and high-repetition-rate femtosecond laser-induced incubation effect.

The minimum feature size can be reduced down to ~30 nm (λ/26) by manipulating film thickness. The fitting analysis between the ablation width and depth predicts that the feature size can be down to ~15 nm at the film thickness of ~10 nm. A nano-grating is fabricated, which demonstrates desirable beam diffraction performance.

This nano-scale resolution would be highly attractive for next-generation laser nano-lithography in far field and in ambient air.
Microsphere femtosecond laser sub-50 nm structuring in far field via non-linear absorption_1
Microsphere femtosecond laser sub-50 nm structuring in far field via non-linear absorption_2
Microsphere femtosecond laser sub-50 nm structuring in far field via non-linear absorption_3
  • On-chip light control of semiconductor optoelectronic devices using integrated metasurfaces
  • Cheng-Long Zheng, Pei-Nan Ni, Yi-Yang Xie, Patrice Genevet
  • Opto-Electronic Advances
  • 2025-01-07
  • Ferroelectric domain engineering of lithium niobate
  • Jackson J. Chakkoria, Aditya Dubey, Arnan Mitchell, Andreas Boes
  • Opto-Electronic Advances
  • 2025-01-03
  • Smart reconfigurable metadevices made of shape memory alloy metamaterials
  • Shiqiang Zhao, Yuancheng Fan, Ruisheng Yang, Zhehao Ye, Fuli Zhang, Chen Wang, Weijia Luo, Yongzheng Wen, Ji Zhou
  • Opto-Electronic Advances
  • 2025-01-03
  • Direct detection with an optimal transfer function: toward the electrical spectral efficiency of coherent homodyne detection
  • Xingfeng Li, Jingchi Li, Xiong Ni, Hudi Liu, Qunbi Zhuge, Haoshuo Chen, William Shieh, Yikai Su
  • Opto-Electronic Science
  • 2024-12-24
  • Enhanced amplified spontaneous emission via splitted strong coupling mode in large-area plasmonic cone lattices
  • Jiazhi Yuan, Jiang Hu, Yan Zheng, Hao Wei, Jiamin Xiao, Yi Wang, Xuchao Zhao, Ye Xiang, Yong Lei, Wenxin Wang
  • Opto-Electronic Science
  • 2024-12-19
  • High-resolution tumor marker detection based on microwave photonics demodulated dual wavelength fiber laser sensor
  • Jie Hu, Weihao Lin, Liyang Shao, Chenlong Xue, Fang Zhao, Dongrui Xiao, Yang Ran, Yue Meng, Panpan He, Zhiguang Yu, Jinna Chen, Perry Ping Shum
  • Opto-Electronic Advances
  • 2024-12-16
  • High performance laser induced plasma assisted ablation by GHz burst mode femtosecond pulses
  • Jingbo Yin, Yulong Zhao, Minghui Hong
  • Opto-Electronic Advances
  • 2024-12-16
  • Sequential harmonic spin–orbit angular momentum generation in nonlinear optical crystals
  • Yutao Tang, Zixian Hu, Junhong Deng, Kingfai Li, Guixin Li
  • Opto-Electronic Advances
  • 2024-12-16
  • Design, setup, and facilitation of the speckle structured illumination endoscopic system
  • Elizabeth Abraham, Zhaowei Liu
  • Opto-Electronic Science
  • 2024-12-13
  • Ultra-high-Q photonic crystal nanobeam cavity for etchless lithium niobate on insulator (LNOI) platform
  • Zhi Jiang, Cizhe Fang, Xu Ran, Yu Gao, Ruiqing Wang, Jianguo Wang, Danyang Yao, Xuetao Gan, Yan Liu, Yue Hao, Genquan Han
  • Opto-Electronic Advances
  • 2024-10-31
  • Advanced biological imaging techniques based on metasurfaces
  • Yongjae Jo, Hyemi Park, Hyeyoung Yoon, Inki Kim
  • Opto-Electronic Advances
  • 2024-10-31
  • Orthogonal matrix of polarization combinations: concept and application to multichannel holographic recording
  • Shujun Zheng, Jiaren Tan, Hongjie Liu, Xiao Lin, Yusuke Saita, Takanori Nomura, Xiaodi Tan
  • Opto-Electronic Advances
  • 2024-10-23



  • Integral imaging-based tabletop light field 3D display with large viewing angle                                Adding dimensions with Lucy–Richardson–Rosen algorithm to incoherent imaging
    About
    |
    Contact
    |
    Copyright © PubCard