(Peer-Reviewed) Periodic transparent nanowires in ITO film fabricated via femtosecond laser direct writing
Qilin Jiang 蒋其麟 ¹, Long Chen 陈龙 ¹, Jukun Liu 刘聚坤 ¹, Yuchan Zhang 张羽婵 ¹, Shian Zhang 张诗按 ¹, Donghai Feng 冯东海 ¹, Tianqing Jia 贾天卿 ¹ ³, Peng Zhou ², Qian Wang ², Zhenrong Sun 孙真荣 ¹, Hongxing Xu 徐红星 ¹
¹ State Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200062, China
中国 上海 华东师范大学物理与电子科学学院 精密光谱科学与技术国家重点实验室
² Huawei Technologies Co, Ltd., Bantian Longgang District, Shenzhen 518129, China
中国 深圳 华为技术有限公司
³ Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
中国 太原 山西大学 山西省极端光学协同创新中心
Opto-Electronic Science, 2023-02-09
Abstract
This paper reports the fabrication of regular large-area laser-induced periodic surface structures (LIPSSs) in indium tin oxide (ITO) films via femtosecond laser direct writing focused by a cylindrical lens. The regular LIPSSs exhibited good properties as nanowires, with a resistivity almost equal to that of the initial ITO film.
By changing the laser fluence, the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of ±10%. Furthermore, the average transmittance of the ITO films with regular LIPSSs in the range of 1200–2000 nm was improved from 21% to 60%. The regular LIPSS is promising for transparent electrodes of nano-optoelectronic devices—particularly in the near-infrared band.
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