(Peer-Reviewed) High performance laser induced plasma assisted ablation by GHz burst mode femtosecond pulses
Jingbo Yin 尹靖博 ¹ ², Yulong Zhao 赵禹龙 ¹, Minghui Hong 洪明辉 ¹ ²
¹ Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, 361005, China
中国 厦门 厦门大学 萨本栋微米纳米科学技术研究院
² Discipline of Intelligent Instrument and Equipment, Xiamen University, Xiamen, 361005, China
中国 厦门 厦门大学 智能仪器与装备专业
Opto-Electronic Advances, 2024-12-16
Abstract
High performance laser micromachining based on the combination of GHz burst mode femtosecond pulses irradiation and laser induced plasma assisted ablation can open a new avenue for high-quality and high-efficiency micromachining of single crystalline sapphire.
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