Year
Month
(Peer-Reviewed) Large-scale and high-quality III-nitride membranes through microcavity-assisted crack propagation by engineering tensile-stressed Ni layers
Jung-Hong Min ¹, Kwangjae Lee ², Tae-Hoon Chung ³, Jung-Wook Min ¹, Kuang-Hui Li ¹, Chun Hong Kang ¹, Hoe-Min Kwak ⁴, Tae-Hyeon Kim ⁵, Youyou Yuan ⁶, Kyoung-Kook Kim ⁵, Dong-Seon Lee ⁴, Tien Khee Ng ¹, Boon S. Ooi ¹
¹ Photonics Laboratory, Computer, Electrical and Mathematical Sciences and Engineering Division (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
² Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA
³ Light Source Research Division, Korea Photonics Technology Institute (KOPTI), Gwangju 61007, Republic of Korea
⁴ School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea
⁵ Department of Advanced Convergence Technology, Research Institute of Advanced Convergence Technology, Korea Polytechnic University, 237 Sangidaehak-ro, Siheung-si 15073, Republic of Korea
⁶ King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
Opto-Electronic Science, 2022-10-28
Abstract

Epitaxially grown III-nitride alloys are tightly bonded materials with mixed covalent-ionic bonds. This tight bonding presents tremendous challenges in developing III-nitride membranes, even though semiconductor membranes can provide numerous advantages by removing thick, inflexible, and costly substrates. Herein, cavities with various sizes were introduced by overgrowing target layers, such as undoped GaN and green LEDs, on nanoporous templates prepared by electrochemical etching of n-type GaN.

The large primary interfacial toughness was effectively reduced according to the design of the cavity density, and the overgrown target layers were then conveniently exfoliated by engineering tensile-stressed Ni layers. The resulting III-nitride membranes maintained high crystal quality even after exfoliation due to the use of GaN-based nanoporous templates with the same lattice constant. The microcavity-assisted crack propagation process developed for the current III-nitride membranes forms a universal process for developing various kinds of large-scale and high-quality semiconductor membranes.
Large-scale and high-quality III-nitride membranes through microcavity-assisted crack propagation by engineering tensile-stressed Ni layers_1
Large-scale and high-quality III-nitride membranes through microcavity-assisted crack propagation by engineering tensile-stressed Ni layers_2
Large-scale and high-quality III-nitride membranes through microcavity-assisted crack propagation by engineering tensile-stressed Ni layers_3
  • On-chip light control of semiconductor optoelectronic devices using integrated metasurfaces
  • Cheng-Long Zheng, Pei-Nan Ni, Yi-Yang Xie, Patrice Genevet
  • Opto-Electronic Advances
  • 2025-01-07
  • Ferroelectric domain engineering of lithium niobate
  • Jackson J. Chakkoria, Aditya Dubey, Arnan Mitchell, Andreas Boes
  • Opto-Electronic Advances
  • 2025-01-03
  • Smart reconfigurable metadevices made of shape memory alloy metamaterials
  • Shiqiang Zhao, Yuancheng Fan, Ruisheng Yang, Zhehao Ye, Fuli Zhang, Chen Wang, Weijia Luo, Yongzheng Wen, Ji Zhou
  • Opto-Electronic Advances
  • 2025-01-03
  • Direct detection with an optimal transfer function: toward the electrical spectral efficiency of coherent homodyne detection
  • Xingfeng Li, Jingchi Li, Xiong Ni, Hudi Liu, Qunbi Zhuge, Haoshuo Chen, William Shieh, Yikai Su
  • Opto-Electronic Science
  • 2024-12-24
  • Enhanced amplified spontaneous emission via splitted strong coupling mode in large-area plasmonic cone lattices
  • Jiazhi Yuan, Jiang Hu, Yan Zheng, Hao Wei, Jiamin Xiao, Yi Wang, Xuchao Zhao, Ye Xiang, Yong Lei, Wenxin Wang
  • Opto-Electronic Science
  • 2024-12-19
  • High-resolution tumor marker detection based on microwave photonics demodulated dual wavelength fiber laser sensor
  • Jie Hu, Weihao Lin, Liyang Shao, Chenlong Xue, Fang Zhao, Dongrui Xiao, Yang Ran, Yue Meng, Panpan He, Zhiguang Yu, Jinna Chen, Perry Ping Shum
  • Opto-Electronic Advances
  • 2024-12-16
  • High performance laser induced plasma assisted ablation by GHz burst mode femtosecond pulses
  • Jingbo Yin, Yulong Zhao, Minghui Hong
  • Opto-Electronic Advances
  • 2024-12-16
  • Sequential harmonic spin–orbit angular momentum generation in nonlinear optical crystals
  • Yutao Tang, Zixian Hu, Junhong Deng, Kingfai Li, Guixin Li
  • Opto-Electronic Advances
  • 2024-12-16
  • Design, setup, and facilitation of the speckle structured illumination endoscopic system
  • Elizabeth Abraham, Zhaowei Liu
  • Opto-Electronic Science
  • 2024-12-13
  • Ultra-high-Q photonic crystal nanobeam cavity for etchless lithium niobate on insulator (LNOI) platform
  • Zhi Jiang, Cizhe Fang, Xu Ran, Yu Gao, Ruiqing Wang, Jianguo Wang, Danyang Yao, Xuetao Gan, Yan Liu, Yue Hao, Genquan Han
  • Opto-Electronic Advances
  • 2024-10-31
  • Advanced biological imaging techniques based on metasurfaces
  • Yongjae Jo, Hyemi Park, Hyeyoung Yoon, Inki Kim
  • Opto-Electronic Advances
  • 2024-10-31
  • Orthogonal matrix of polarization combinations: concept and application to multichannel holographic recording
  • Shujun Zheng, Jiaren Tan, Hongjie Liu, Xiao Lin, Yusuke Saita, Takanori Nomura, Xiaodi Tan
  • Opto-Electronic Advances
  • 2024-10-23



  • Carnivorous plants inspired shape-morphing slippery surfaces                                Spatiotemporal Fourier transform with femtosecond pulses for on-chip devices
    About
    |
    Contact
    |
    Copyright © PubCard